專利名稱
加熱輔助覆晶接合裝置
專利證號
US11,682,650 B2
專利國別
美國
發明人代表
盧威華
專利技術摘要
A heat assisted flip chip bonding apparatus includes a semiconductor assembly having a substrate and a chip, a heating source and a press and cover assembly having a cover element and press elements. The chip is disposed above the substrate and includes conductors which contact with conductive pads on the substrate. The heating source is provided to emit a heated light which illuminates the chip via an opening of the cover element. The press elements are located between the cover element and the semiconductor assembly and each includes an elastic unit and a pressing unit. Both ends of the elastic unit are connected to the cover element and the pressing unit respectively, and the pressing unit is provided to press a back surface of the chip.
可應用範圍
(產業利用性)
本案之紅外線輔助接合裝置藉由紅外線加熱晶片、金屬凸塊及基板,及由具有彈性按壓件之遮罩在接合製程中對該晶片加壓,使晶片可與基板完成連接,避免晶片翹曲等組裝問題。本技術可運用於高階晶片組裝技術,具有產業應用性。